Lithium tantalate layer guided plate mode sensors

Evans, C.R., Stanley, S.M., Percival, C.J., McHale, G. and Newton, M.I. ORCID: 0000-0003-4231-1002, 2005. Lithium tantalate layer guided plate mode sensors. In: 19th European Conference on Solid-State Transducers, Barcelona, 11-14 September 2005, Barcelona.

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Abstract

Wafers of lithium tantalate have been lapped and polished prior to the fabrication of interdigital transducers (IDT). The effect of building up successive polymer layers is reported for both the surface containing the IDT and the opposite face. The data demonstrates the ability of lithium tantalate to support layer guided plate mode; such acoustic wave sensors allow fabrication of the transducers on the opposite face to the sensing surface. In addition, the sensitivity to thin gold films deposited on the guiding layers both on the IDT and opposite faces is reported.

Item Type:	Conference contribution
Creators:	Evans, C.R., Stanley, S.M., Percival, C.J., McHale, G. and Newton, M.I.
Date:	2005
Divisions:	Schools > School of Science and Technology
Record created by:	EPrints Services
Date Added:	09 Oct 2015 09:42
Last Modified:	09 Jun 2017 13:08
URI:	https://irep.ntu.ac.uk/id/eprint/1334

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