Growth and dielectic characterization of yttrium oxide thin films deposited on SI by r.f.- magnetron sputtering

Cranton, W.M., Spink, D.M., Stevens, R. and Thomas, C.B., 1993. Growth and dielectic characterization of yttrium oxide thin films deposited on SI by r.f.- magnetron sputtering. Thin Solid Films, 226 (1), pp. 156-160.

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Item Type: Journal article
Publication Title: Thin Solid Films
Creators: Cranton, W.M., Spink, D.M., Stevens, R. and Thomas, C.B.
Date: 1993
Volume: 226
Number: 1
Divisions: Schools > School of Science and Technology
Depositing User: EPrints Services
Date Added: 09 Oct 2015 10:55
Last Modified: 19 Oct 2015 14:38
URI: http://irep.ntu.ac.uk/id/eprint/20194

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