Method and system for computing Fourier series coefficients for mask layouts using FFT

Hurley, P.T., Kryszczuk, K., Scheibler, R. and Schipani, D., 2011. Method and system for computing Fourier series coefficients for mask layouts using FFT. US 2011/0271240.

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Item Type:	Patent/Published patent application
Creators:	Hurley, P.T., Kryszczuk, K., Scheibler, R. and Schipani, D.
Date:	2011
Identifiers:	Number Type US 2011/0271240 Other
Divisions:	Schools > School of Science and Technology
Record created by:	EPrints Services
Date Added:	09 Oct 2015 09:50
Last Modified:	23 Aug 2016 09:06
URI:	https://irep.ntu.ac.uk/id/eprint/3616

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