Method and system for computing Fourier series coefficients for mask layouts using FFT

HURLEY, P.T., KRYSZCZUK, K., SCHEIBLER, R. and SCHIPANI, D., 2011. Method and system for computing Fourier series coefficients for mask layouts using FFT. US 2011/0271240.

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Item Type: Patent/Published patent application
Creators: Hurley, P.T., Kryszczuk, K., Scheibler, R. and Schipani, D.
Date: 2011
Identifiers:
NumberType
US 2011/0271240Other
Divisions: Schools > School of Science and Technology
Depositing User: EPrints Services
Date Added: 09 Oct 2015 09:50
Last Modified: 23 Aug 2016 09:06
URI: http://irep.ntu.ac.uk/id/eprint/3616

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