Method and system for computing Fourier series coefficients for mask layouts using FFT

Hurley, PT, Kryszczuk, K, Scheibler, R and Schipani, D, 2011. Method and system for computing Fourier series coefficients for mask layouts using FFT. US 2011/0271240.

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Item Type: Patent/Published patent application
Creators: Hurley, P.T., Kryszczuk, K., Scheibler, R. and Schipani, D.
Date: 2011
Identifiers:
NumberType
US 2011/0271240Other
Divisions: Schools > School of Science and Technology
Depositing User: EPrints Services
Date Added: 09 Oct 2015 09:50
Last Modified: 23 Aug 2016 09:06
URI: http://irep.ntu.ac.uk/id/eprint/3616

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