Embedded metal oxide plasmonics using local plasma oxidation of AZO for planar metasurfaces

Sun, K., Xiao, W., Ye, S., Kalfagiannis, N. ORCID: 0000-0002-4030-5525, Kiang, K.S., Groot, C.H. and Muskens, O.L., 2020. Embedded metal oxide plasmonics using local plasma oxidation of AZO for planar metasurfaces. Advanced Materials, 32 (25): 2001534. ISSN 0935-9648

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New methods for achieving high‐quality conducting oxide metasurfaces are of great importance for a range of emerging applications from infrared thermal control coatings to epsilon‐near‐zero nonlinear optics. This work demonstrates the viability of plasma patterning as a technique to selectively and locally modulate the carrier density in planar Al‐doped ZnO (AZO) metasurfaces without any associated topographical surface profile. This technique stands in strong contrast to conventional physical patterning which results in nonplanar textured surfaces. The approach can open up a new route to form novel photonic devices with planar metasurfaces, for example, antireflective coatings and multi‐layer devices. To demonstrate the performance of the carrier‐modulated AZO metasurfaces, two types of devices are realized using the demonstrated plasma patterning. A metasurface optical solar reflector is shown to produce infrared emissivity equivalent to a conventional etched design. Second, a multiband metasurface is achieved by integrating a Au visible‐range metasurface on top of the planar AZO infrared metasurface. Independent control of spectral bands without significant cross‐talk between infrared and visible functionalities is achieved. Local carrier tuning of conducting oxide films offers a conceptually new approach for oxide‐based photonics and nanoelectronics and opens up new routes for integrated planar metasurfaces in optical technology.

Item Type: Journal article
Publication Title: Advanced Materials
Creators: Sun, K., Xiao, W., Ye, S., Kalfagiannis, N., Kiang, K.S., Groot, C.H. and Muskens, O.L.
Publisher: Wiley
Date: 26 June 2020
Volume: 32
Number: 25
ISSN: 0935-9648
Rights: © 2020 The Authors. Published by WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim. This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.
Divisions: Schools > School of Science and Technology
Record created by: Linda Sullivan
Date Added: 23 Jun 2020 13:45
Last Modified: 28 Jul 2020 14:09
URI: https://irep.ntu.ac.uk/id/eprint/40087

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