Optimization of plasma etch processes using evolutionary search methods with in-situ diagnostics

Al-Kuzee, J., Matsuura, T., Goodyear, A., Nolle, L., Hopgood, A.A., Picton, P.D. and Braithwaite, N.S.J., 2004. Optimization of plasma etch processes using evolutionary search methods with in-situ diagnostics. Plasma Sources Science and Technology, 13 (4), pp. 612-622. ISSN 0963-0252

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Item Type:	Journal article
Publication Title:	Plasma Sources Science and Technology
Creators:	Al-Kuzee, J., Matsuura, T., Goodyear, A., Nolle, L., Hopgood, A.A., Picton, P.D. and Braithwaite, N.S.J.
Publisher:	IOP Publishing Ltd.
Place of Publication:	Bristol
Date:	2004
Volume:	13
Number:	4
ISSN:	0963-0252
Divisions:	Schools > School of Science and Technology
Record created by:	EPrints Services
Date Added:	09 Oct 2015 10:12
Last Modified:	19 Oct 2015 14:28
URI:	https://irep.ntu.ac.uk/id/eprint/9265

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