Optimization of plasma etch processes using evolutionary search methods with in-situ diagnostics

Al-Kuzee, J, Matsuura, T, Goodyear, A, Nolle, L, Hopgood, AA, Picton, PD and Braithwaite, NSJ, 2004. Optimization of plasma etch processes using evolutionary search methods with in-situ diagnostics. Plasma Sources Science and Technology, 13 (4), pp. 612-622. ISSN 0963-0252

Full text not available from this repository.
Item Type: Journal article
Publication Title: Plasma Sources Science and Technology
Creators: Al-Kuzee, J., Matsuura, T., Goodyear, A., Nolle, L., Hopgood, A.A., Picton, P.D. and Braithwaite, N.S.J.
Publisher: IOP Publishing Ltd.
Place of Publication: Bristol
Date: 2004
Volume: 13
Number: 4
ISSN: 0963-0252
Divisions: Schools > School of Science and Technology
Depositing User: EPrints Services
Date Added: 09 Oct 2015 10:12
Last Modified: 19 Oct 2015 14:28
URI: http://irep.ntu.ac.uk/id/eprint/9265

Actions (login required)

Edit View Edit View

Views

Views per month over past year

Downloads

Downloads per month over past year