Items where Author is "Matsuura, T"

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Number of items: 3.

Journal article

AL-KUZEE, J., MATSUURA, T., GOODYEAR, A., NOLLE, L., HOPGOOD, A.A., PICTON, P.D. and BRAITHWAITE, N.S.J., 2004. Optimization of plasma etch processes using evolutionary search methods with in-situ diagnostics. Plasma Sources Science and Technology, 13 (4), pp. 612-622. ISSN 0963-0252

Chapter in book

AL-KUZEE, J., MATSUURA, T., GOODYEAR, A., NOLLE, L., HOPGOOD, A.A., PICTON, P.D. and BRAITHWAITE, N.S.J., 2003. Intelligent control of low pressure plasma processing. In: Proceedings of the 29th Annual Conference of the IEEE Industrial Electronics Society. UNSPECIFIED. ISBN 0787079071

Conference contribution

AL-KUZEE, J., MATSUURA, T., NOLLE, L., HOPGOOD, A.A., PICTON, P.D. and BRAITHWAITE, N.S.J., 2002. Intelligent control of low pressure plasma processing [poster presentation]. In: Technological Plasma Initiative Meeting, Warwick, 17-18 December, 2002, Warwick.

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