Water based PVA sacrificial material for low temperature MEMS fabrication and applications on e-textiles

Yang, K., Torah, R., Wei, Y. ORCID: 0000-0001-6195-8595, Beeby, S. and Tudor, J., 2014. Water based PVA sacrificial material for low temperature MEMS fabrication and applications on e-textiles. Procedia Engineering, 87, pp. 1565-1568. ISSN 1877-7058

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A sacrificial-layer approach enables the realisation of free-standing mechanical structures on textiles. This work presents a screen printable water based polyvinyl alcohol (PVA) sacrificial material, which, when printed and dried, provides a stable mechanical support for subsequent printed structural layers. The PVA support layer can be removed in water once all other processes are complete. The sacrificial paste is compatible with most textiles and is environmentally friendly due to a low release of volatile organic compounds (VOC). The process is demonstrated by fabricating a capacitively coupled cantilever on textile using screen printing. The resultant cantilever has a resonant frequency of 145 Hz that confirms the PVA sacrificial material has been entirely removed.

Item Type: Journal article
Publication Title: Procedia Engineering
Creators: Yang, K., Torah, R., Wei, Y., Beeby, S. and Tudor, J.
Publisher: Elsevier
Date: 2014
Volume: 87
ISSN: 1877-7058
S1877705814027143Publisher Item Identifier
Rights: © 2014 Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/3.0/). Peer-review under responsibility of the scientific committee of Eurosensors 2014 doi: 10.1016/j.proeng.2014.11.599
Divisions: Schools > School of Science and Technology
Record created by: Linda Sullivan
Date Added: 02 Jul 2019 08:38
Last Modified: 02 Jul 2019 08:38
URI: https://irep.ntu.ac.uk/id/eprint/36997

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