Reactive laser annealing of indium tin oxide: implications to crystal structure, defect composition, and plasma energy

Hillier, JA ORCID: https://orcid.org/0000-0002-3784-9337, Patsalas, P, Karfardis, D, Cranton, W, Nabok, AV, Mellor, CJ, Koutsogeorgis, DC ORCID: https://orcid.org/0000-0001-6167-1084 and Kalfagiannis, N ORCID: https://orcid.org/0000-0002-4030-5525, 2022. Reactive laser annealing of indium tin oxide: implications to crystal structure, defect composition, and plasma energy. Optical Materials Express, 12 (11), pp. 4310-4327. ISSN 2159-3930

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Abstract

The mechanisms governing the modification of the optoelectronic properties of low carrier concentration indium tin oxide (ITO) during reactive laser annealing (ReLaA) are investigated. ReLA combines the advantages of reactive ambient thermal annealing and laser annealing; utilizing laser processing of room-temperature sputtered ITO thin films in pressurized reactive environments to probe the films’ crystal structure and defect composition. Advanced ellipsometric modelling (considering depth-inhomogeneity and intra- and inter-grain carrier transport), cross-sectional transmission electron microscopy, and X-ray photoelectron spectroscopy revealed ReLA-induced depth-dependent compositional and structural modifications that tuned the carrier concentration ((0.3 − 1.27) × 1020 cm−3) and epsilon-near-zero domain (3.07−11.7

Item Type:	Journal article
Publication Title:	Optical Materials Express
Creators:	Hillier, J.A., Patsalas, P., Karfardis, D., Cranton, W., Nabok, A.V., Mellor, C.J., Koutsogeorgis, D.C. and Kalfagiannis, N.
Publisher:	Optica Publishing Group
Date:	1 November 2022
Volume:	12
Number:	11
ISSN:	2159-3930
Identifiers:	Number Type 10.1364/ome.464918 DOI 1609731 Other
Rights:	© 2022 Optica Publishing Group under the terms of the Open Access Publishing Agreement. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved.
Divisions:	Schools > School of Science and Technology
Record created by:	Jeremy Silvester
Date Added:	04 Nov 2022 10:25
Last Modified:	04 Nov 2022 11:34
URI:	https://irep.ntu.ac.uk/id/eprint/47330

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