Excimer laser processing of inkjet-printed and sputter-deposited transparent conducting SnO2:Sb for flexible electronics

CRANTON, W., WILSON, S.L., RANSON, R.M., KOUTSOGEORGIS, D.C., CHI, K., HEDGLEY, R., SCOTT, J., LIPIEC, S., SPILLER, A. and SPEAKMAN, S., 2007. Excimer laser processing of inkjet-printed and sputter-deposited transparent conducting SnO2:Sb for flexible electronics. Thin Solid Films, 515 (24), pp. 8534-8538. ISSN 0040-6090

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Abstract

The feasibility of low-temperature fabrication of transparent electrode elements from thin films of antimony-doped tin oxide (SnO2:Sb, ATO) has been investigated via inkjet printing, rf magnetron sputtering and post-deposition excimer laser processing. Laser processing of thin films on both glass and plastic substrates was performed using a Lambda Physik 305i excimer laser, with fluences in the range 20–100 mJ cm− 2 reducing sheet resistance from as-deposited values by up to 3 orders of magnitude. This is consistent with TEM analysis of the films that shows a densification of the upper 200 nm of laser-processed regions.

Item Type: Journal article
Publication Title: Thin Solid Films
Creators: Cranton, W., Wilson, S.L., Ranson, R.M., Koutsogeorgis, D.C., Chi, K., Hedgley, R., Scott, J., Lipiec, S., Spiller, A. and Speakman, S.
Publisher: Elsevier (not including Cell Press)
Date: 2007
Volume: 515
Number: 24
ISSN: 0040-6090
Identifiers:
NumberType
10.1016/j.tsf.2007.03.118DOI
Rights: Copyright © 2007 Elsevier B.V. All rights reserved
Divisions: Schools > School of Science and Technology
Depositing User: EPrints Services
Date Added: 09 Oct 2015 10:29
Last Modified: 09 Jun 2017 13:31
URI: http://irep.ntu.ac.uk/id/eprint/13618

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