Excimer laser processing of inkjet-printed and sputter-deposited transparent conducting SnO2:Sb for flexible electronics

Cranton, W ORCID: https://orcid.org/0000-0002-0142-7810, Wilson, SL, Ranson, RM ORCID: https://orcid.org/0000-0002-4619-3982, Koutsogeorgis, DC ORCID: https://orcid.org/0000-0001-6167-1084, Chi, K, Hedgley, R, Scott, J, Lipiec, S, Spiller, A and Speakman, S, 2007. Excimer laser processing of inkjet-printed and sputter-deposited transparent conducting SnO2:Sb for flexible electronics. Thin Solid Films, 515 (24), pp. 8534-8538. ISSN 0040-6090

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Abstract

The feasibility of low-temperature fabrication of transparent electrode elements from thin films of antimony-doped tin oxide (SnO2:Sb, ATO) has been investigated via inkjet printing, rf magnetron sputtering and post-deposition excimer laser processing. Laser processing of thin films on both glass and plastic substrates was performed using a Lambda Physik 305i excimer laser, with fluences in the range 20–100 mJ cm− 2 reducing sheet resistance from as-deposited values by up to 3 orders of magnitude. This is consistent with TEM analysis of the films that shows a densification of the upper 200 nm of laser-processed regions.

Item Type:	Journal article
Publication Title:	Thin Solid Films
Creators:	Cranton, W., Wilson, S.L., Ranson, R.M., Koutsogeorgis, D.C., Chi, K., Hedgley, R., Scott, J., Lipiec, S., Spiller, A. and Speakman, S.
Publisher:	Elsevier (not including Cell Press)
Date:	2007
Volume:	515
Number:	24
ISSN:	0040-6090
Identifiers:	Number Type 10.1016/j.tsf.2007.03.118 DOI
Rights:	Copyright © 2007 Elsevier B.V. All rights reserved
Divisions:	Schools > School of Science and Technology
Record created by:	EPrints Services
Date Added:	09 Oct 2015 10:29
Last Modified:	24 Mar 2022 14:20
URI:	https://irep.ntu.ac.uk/id/eprint/13618

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