Rapid laser-induced photochemical conversion of sol–gel precursors to In2O3 layers and their application in thin-film transistors

Dellis, S., Isakov, I., Kalfagiannis, N. ORCID: 0000-0002-4030-5525, Tetzner, K., Anthopoulos, T.D. and Koutsogeorgis, D.C. ORCID: 0000-0001-6167-1084, 2017. Rapid laser-induced photochemical conversion of sol–gel precursors to In2O3 layers and their application in thin-film transistors. Journal of Materials Chemistry C, 5 (15), pp. 3673-3677. ISSN 2050-7526

[img]
Preview
Text
PubSub8541_Koutsogeorgis.pdf - Published version

Download (1MB) | Preview

Abstract

We report the development of indium oxide (In2O3) transistors via a single step laser-induced photochemical conversion process of a sol–gel metal oxide precursor. Through careful optimization of the laser annealing conditions we demonstrated successful conversion of the precursor to In2O3 and its subsequent implementation in n-channel transistors with electron mobility up to 13 cm2 V−1 s−1. Importantly, the process does not require thermal annealing making it compatible with temperature sensitive materials such as plastic. On the other hand, the spatial conversion/densification of the sol–gel layer eliminates additional process steps associated with semiconductor patterning and hence significantly reduces fabrication complexity and cost. Our work demonstrates unambiguously that laser-induced photochemical conversion of sol–gel metal oxide precursors can be rapid and suitable for the manufacturing of large-area electronics.

Item Type: Journal article
Publication Title: Journal of Materials Chemistry C
Creators: Dellis, S., Isakov, I., Kalfagiannis, N., Tetzner, K., Anthopoulos, T.D. and Koutsogeorgis, D.C.
Publisher: Royal Society of Cehmistry
Date: 2017
Volume: 5
Number: 15
ISSN: 2050-7526
Identifiers:
NumberType
10.1039/c7tc00169jDOI
Divisions: Schools > School of Science and Technology
Depositing User: Linda Sullivan
Date Added: 12 Jun 2017 10:12
Last Modified: 12 Jun 2017 10:12
URI: http://irep.ntu.ac.uk/id/eprint/30930

Actions (login required)

Edit View Edit View

Views

Views per month over past year

Downloads

Downloads per month over past year