Intelligent control of low pressure plasma processing

Al-Kuzee, J., Matsuura, T., Goodyear, A., Nolle, L., Hopgood, A.A., Picton, P.D. and Braithwaite, N.S.J., 2003. Intelligent control of low pressure plasma processing. In: Proceedings of the 29th Annual Conference of the IEEE Industrial Electronics Society. UNSPECIFIED. ISBN 0787079071

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Item Type: Chapter in book
Creators: Al-Kuzee, J., Matsuura, T., Goodyear, A., Nolle, L., Hopgood, A.A., Picton, P.D. and Braithwaite, N.S.J.
Date: 2003
Divisions: Schools > School of Science and Technology
Depositing User: EPrints Services
Date Added: 09 Oct 2015 09:40
Last Modified: 19 Oct 2015 14:21
URI: http://irep.ntu.ac.uk/id/eprint/795

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