Intelligent control of low pressure plasma processing

Al-Kuzee, J, Matsuura, T, Goodyear, A, Nolle, L, Hopgood, AA, Picton, PD and Braithwaite, NSJ, 2003. Intelligent control of low pressure plasma processing. In: Proceedings of the 29th Annual Conference of the IEEE Industrial Electronics Society. UNSPECIFIED. ISBN 0787079071

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Item Type:	Chapter in book
Creators:	Al-Kuzee, J., Matsuura, T., Goodyear, A., Nolle, L., Hopgood, A.A., Picton, P.D. and Braithwaite, N.S.J.
Date:	2003
ISBN:	0787079071
Divisions:	Schools > School of Science and Technology
Record created by:	EPrints Services
Date Added:	09 Oct 2015 09:40
Last Modified:	19 Oct 2015 14:21
URI:	https://irep.ntu.ac.uk/id/eprint/795

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