Lithium tantalate layer guided plate mode sensors

Evans, CR, Stanley, SM, Percival, CJ, McHale, G and Newton, MI ORCID: https://orcid.org/0000-0003-4231-1002, 2006. Lithium tantalate layer guided plate mode sensors. Sensors and Actuators A - Physical, 132 (1), pp. 241-244. ISSN 0924-4247

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Abstract

Wafers of lithium tantalate have been lapped and polished prior to the fabrication of interdigital transducers (IDT). The effect of building up successive polymer layers is reported for both the surface containing the IDT and the opposite face. The data demonstrates the ability of lithium tantalate to support layer guided plate mode; such acoustic wave sensors allow fabrication of the transducers on the opposite face to the sensing surface. In addition, the sensitivity to thin gold films deposited on the guiding layers both on the IDT and opposite faces is reported.

Item Type:	Journal article
Publication Title:	Sensors and Actuators A - Physical
Creators:	Evans, C.R., Stanley, S.M., Percival, C.J., McHale, G. and Newton, M.I.
Publisher:	Elsevier
Place of Publication:	Lausanne
Date:	2006
Volume:	132
Number:	1
ISSN:	0924-4247
Identifiers:	Number Type 10.1016/j.sna.2006.01.030 DOI
Divisions:	Schools > School of Science and Technology
Record created by:	EPrints Services
Date Added:	09 Oct 2015 10:24
Last Modified:	09 Jun 2017 13:28
URI:	https://irep.ntu.ac.uk/id/eprint/12312

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