Intrinsic photoluminescence from low temperature deposited zinc oxide thin films as a function of laser and thermal annealing

Tsakonas, C ORCID: https://orcid.org/0000-0002-7342-3405, Cranton, W ORCID: https://orcid.org/0000-0002-0142-7810, Li, F, Abusabee, K, Flewitt, A, Koutsogeorgis, D ORCID: https://orcid.org/0000-0001-6167-1084 and Ranson, R ORCID: https://orcid.org/0000-0002-4619-3982, 2013. Intrinsic photoluminescence from low temperature deposited zinc oxide thin films as a function of laser and thermal annealing. Journal of Physics D: Applied Physics, 46 (9). ISSN 0022-3727

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Abstract

An investigation into the modification of low temperature deposited ZnO thin films by different annealing processes has been undertaken using laser, thermal and rapid thermal annealing of 60nm ZnO films deposited by Hi-Target-Utilization-Sputtering. Single pulse laser annealing using a KrF excimer laser ( A = 248nm) over a range of fluences up to 315 mJ/cm2 demonstrates controlled indepth modification of internal film microstructure and luminescence properties without the film degradation produced by high temperature thermal and RTA processes. Photoluminescence properties show that the ratio of defect related deep level emission (DLE, 450nm -750nm, 2.76eV-1.65eV) to excitonic near band-edge emission (NBE at 381nm, 3.26eV) is directly correlated to processing parameters. Thermal and rapid thermal processing results in the evolution of a strong visible orange/red DLE photoluminescence (with peaks at 590nm, 2.10eV and 670nm, 1.85eV) dominated by defects related to excess oxygen. At higher temperatures, the appearance of a green/yellow emission (530nm, 2.34eV) indicates a transition of the dominant radiative transfer mechanism. In contrast, laser processing removes defect related DLE and produces films with intense NBE luminescence, correlated to the observed formation of large grains (25-40nm).

Item Type:	Journal article
Publication Title:	Journal of Physics D: Applied Physics
Creators:	Tsakonas, C., Cranton, W., Li, F., Abusabee, K., Flewitt, A., Koutsogeorgis, D. and Ranson, R.
Publisher:	IOP Publishing
Place of Publication:	Bristol
Date:	2013
Volume:	46
Number:	9
ISSN:	0022-3727
Identifiers:	Number Type 10.1088/0022-3727/46/9/095305 DOI
Rights:	© 2013 IOP Publishing
Divisions:	Schools > School of Science and Technology
Record created by:	EPrints Services
Date Added:	09 Oct 2015 10:41
Last Modified:	04 Feb 2022 14:46
URI:	https://irep.ntu.ac.uk/id/eprint/16730

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