A novel fabrication process to realise piezoelectric cantilever structures for smart fabric sensor applications

Wei, Y ORCID: https://orcid.org/0000-0001-6195-8595, Torah, R, Yang, K, Beeby, S and Tudor, J, 2012. A novel fabrication process to realise piezoelectric cantilever structures for smart fabric sensor applications. In: 2012 IEEE Sensors, Tapipei International Convention Center, Taipei, Taiwan, 28-31 October 2012. Proceedings. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE), pp. 327-330. ISBN 9781457717659

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Abstract

This paper reports a novel process for realising freestanding piezoelectric cantilevers printed on fabric for potential use as a wearable sensor. Piezoelectric cantilever structures were fabricated by screen printing a piezoelectric stack on top of a structural layer that is supported by a sacrificial material during printing. The sacrificial layer was subsequently removed in an oven at 160 °C for 30 minutes which is sufficient to fully release the cantilever beam from the substrate. The samples were polarised by applying an electric field across the piezoelectric stack. Testing on an electromechanical shaker shows that the cantilevers have resonant frequencies at 390 and 260 Hz for beam lengths of 12 and 15 mm, respectively. The beams produced maximum outputs of 38 and 27 mV at an acceleration of 11.76 m/s 2 , respectively.

Item Type:	Chapter in book
Creators:	Wei, Y., Torah, R., Yang, K., Beeby, S. and Tudor, J.
Publisher:	Institute of Electrical and Electronics Engineers (IEEE)
Place of Publication:	Piscataway, NJ
Date:	October 2012
ISBN:	9781457717659
Identifiers:	Number Type 10.1109/icsens.2012.6411076 DOI
Divisions:	Schools > School of Science and Technology
Record created by:	Linda Sullivan
Date Added:	02 Jul 2019 13:06
Last Modified:	02 Jul 2019 13:06
URI:	https://irep.ntu.ac.uk/id/eprint/37011

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