A novel fabrication process for capacitive cantilever structures for smart fabric applications

Wei, Y ORCID: https://orcid.org/0000-0001-6195-8595, Torah, R, Yang, K, Beeby, S and Tudor, J, 2012. A novel fabrication process for capacitive cantilever structures for smart fabric applications. In: 2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Cannes, France, 25-27 April 2012 [proceedings]. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE), pp. 136-139. ISBN 9781467307857

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Abstract

This paper reports, for the first time, capacitive freestanding cantilever beams fabricated by screen printing sacrificial and structural materials onto a fabric/textile. Unlike traditional weaving process, the device will be screen printed layer by layer with desired pattern onto the fabric substrate. Free standing structures will be fabricated directly onto fabrics rather than other methods such as bonding or embedding. In addition, a low temperature removable sacrificial material capable for the removal conditions on fabrics will also be reported.

Item Type:	Chapter in book
Creators:	Wei, Y., Torah, R., Yang, K., Beeby, S. and Tudor, J.
Publisher:	Institute of Electrical and Electronics Engineers (IEEE)
Place of Publication:	Piscataway, NJ
Date:	April 2012
ISBN:	9781467307857
Divisions:	Schools > School of Science and Technology
Record created by:	Linda Sullivan
Date Added:	02 Jul 2019 13:32
Last Modified:	02 Jul 2019 13:33
URI:	https://irep.ntu.ac.uk/id/eprint/37012

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