Ultrahigh-Q guided mode resonances in an all-dielectric metasurface

Huang, L, Jin, R, Zhou, C, Li, G, Xu, L ORCID: https://orcid.org/0000-0001-9071-4311, Overvig, A, Deng, F, Chen, X, Lu, W, Alù, A and Miroshnichenko, AE, 2023. Ultrahigh-Q guided mode resonances in an all-dielectric metasurface. Nature Communications, 14: 3433.

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Abstract

High quality(Q) factor optical resonators are indispensable for many photonic devices. While very large Q-factors can be obtained theoretically in guided-mode settings, free-space implementations suffer from various limitations on the narrowest linewidth in real experiments. Here, we propose a simple strategy to enable ultrahigh-Q guided-mode resonances by introducing a patterned perturbation layer on top of a multilayer-waveguide system. We demonstrate that the associated Q-factors are inversely proportional to the perturbation squared while the resonant wavelength can be tuned through material or structural parameters. We experimentally demonstrate such high-Q resonances at telecom wavelengths by patterning a low-index layer on top of a 220 nm silicon on insulator substrate. The measurements show Q-factors up to 2.39 × 10⁵, comparable to the largest Q-factor obtained by topological engineering, while the resonant wavelength is tuned by varying the lattice constant of the top perturbation layer. Our results hold great promise for exciting applications like sensors and filters.

Item Type:	Journal article
Publication Title:	Nature Communications
Creators:	Huang, L., Jin, R., Zhou, C., Li, G., Xu, L., Overvig, A., Deng, F., Chen, X., Lu, W., Alù, A. and Miroshnichenko, A.E.
Publisher:	Springer Science and Business Media LLC
Date:	10 June 2023
Volume:	14
Identifiers:	Number Type 10.1038/s41467-023-39227-5 DOI 1850811 Other
Rights:	© The Author(s) 2023 This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
Divisions:	Schools > School of Science and Technology
Record created by:	Jeremy Silvester
Date Added:	11 Jan 2024 12:04
Last Modified:	11 Jan 2024 12:04
URI:	https://irep.ntu.ac.uk/id/eprint/50668

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