Monolithic metal oxide thin-film transistors (TFTs) via photonic processing of sol-gel precursors

Spink, MG, 2025. Monolithic metal oxide thin-film transistors (TFTs) via photonic processing of sol-gel precursors. PhD, Nottingham Trent University.

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Abstract

The intrinsic limitations of traditional vacuum-based techniques and silicon electronics enforce restrictions that prevent the realisation for new device paradigms such as the Internet of Things. Large-area electronics aims to circumvent these roadblocks, using processes and techniques amenable to scalable, high throughput manufacturing with materials with mature properties. Photonic processing such as laser annealing has recently shown some promise utilising the electrical stability and versatility of metal oxides in solution processed forms. However, using photonic processing for solution processed materials effectively means further understanding of the photochemical conversion process, light-matter interactions as well as how this translates to electrical device performance. This work developed vital electrical devices for modern electronics (i.e. thin-film transistors and Schottky diodes) while investigating light-matter interactions via coupled self-consistent opto-thermal simulations. For the first time, opto-thermal simulations are used to determine the temperature rise in metal oxide thin films and solution precursors due to pulsed laser annealing (LA), with these temperature rises also correlated to electrical device performance. These opto-thermal simulations gave way to experimental parameters for investigating the photochemical conversion of metal oxide sol-gel dielectrics to thin films which would act as the base for TFTs. For the first time, Infra-Red Spectroscopic Ellipsometry (IRSE) with metallic substrates was employed for high sensitivity detection of chemical groups in sol-gel LA dielectrics. Finally, the developed sol-gel dielectric and opto-thermal simulations were combined to demonstrate the first fully sol-gel LA TFTs. In addition, laser processing was used as a novel patterning technique for developing nano-Schottky diodes with GHz operation.

Item Type: Thesis
Description: This research programme was carried out in collaboration with King Abdullah University of Science and Technology, Saudi Arabia and University of Ioannina, Greece
Creators: Spink, M.G.
Contributors:
Name
Role
NTU ID
ORCID
Koutsogeorgis, D.
Thesis supervisor
EEE3KOUTSD
O'Neill, M.
Thesis supervisor
SST3ONEILM
Kalfagiannis, N.
Thesis supervisor
SST3KALFAN
Date: March 2025
Rights: The copyright in this work is held by the author. You may copy up to 5% of this work for private study, or personal, non-commercial research. Any re-use of the information contained within this document should be fully referenced, quoting the author, title, university, degree level and pagination. Queries or requests for any other use, or if a more substantial copy is required, should be directed to the author.
Divisions: Schools > School of Science and Technology
Record created by: Laura Borcherds
Date Added: 28 Nov 2025 14:59
Last Modified: 28 Nov 2025 14:59
URI: https://irep.ntu.ac.uk/id/eprint/54826

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