Intelligent control of low pressure plasma processing [poster presentation]

Al-Kuzee, J, Matsuura, T, Nolle, L, Hopgood, AA, Picton, PD and Braithwaite, NSJ, 2002. Intelligent control of low pressure plasma processing [poster presentation]. In: Technological Plasma Initiative Meeting, Warwick, 17-18 December, 2002, Warwick.

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Item Type:	Conference contribution
Creators:	Al-Kuzee, J., Matsuura, T., Nolle, L., Hopgood, A.A., Picton, P.D. and Braithwaite, N.S.J.
Date:	2002
Divisions:	Schools > School of Science and Technology
Record created by:	EPrints Services
Date Added:	09 Oct 2015 10:08
Last Modified:	19 Oct 2015 14:28
URI:	https://irep.ntu.ac.uk/id/eprint/8310

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