Meso scale component manufacturing: a comparative analysis of non-lithography and lithography-based processes

Khalid, A ORCID: https://orcid.org/0000-0001-5270-6599, Wei, Y ORCID: https://orcid.org/0000-0001-6195-8595, Saleem, MR and Lughmani, WA, 2022. Meso scale component manufacturing: a comparative analysis of non-lithography and lithography-based processes. Journal of Micromechanics and Microengineering, 32 (6): 063002. ISSN 0960-1317

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Abstract

The paper identifies the meso scale (10 µm to few millimeters) component size that can be manufactured by using both lithography and non-lithography based approaches. Non-lithography based meso/micro manufacturing is gaining popularity to make micro 3D artifacts with various engineering materials. Being in the nascent stage, this technology looks promising for future micro manufacturing trends. Currently, lithography based micro manufacturing techniques are mature, and used for mass production of 2D, 2.5D features and products extending to 3D micro parts in some cases. In this paper, both the techniques at state-of-the-art level for meso/micro scale are explained first. The comparison is arranged based on examples and a criterion is set in terms of achievable accuracy, production rate, cost, size and form of artifacts and materials used. The analysis revealed a third combined approach where a mix of both techniques can work together for meso scale products. Critical issues affecting both the manufacturing approaches, to advance in terms of accuracy, process physics, materials, machines and product design are discussed. Process effectiveness guideline with respect to the component scale, materials, achievable tolerances, production rates and application is emerged, as a result of this exercise.

Item Type:	Journal article
Publication Title:	Journal of Micromechanics and Microengineering
Creators:	Khalid, A., Wei, Y., Saleem, M.R. and Lughmani, W.A.
Publisher:	IOP Publishing
Date:	2022
Volume:	32
Number:	6
ISSN:	0960-1317
Identifiers:	Number Type 10.1088/1361-6439/ac6b7d DOI 1545264 Other
Rights:	© 2022 the author(s). Published by IOP Publishing Ltd. Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Divisions:	Schools > School of Science and Technology
Record created by:	Jonathan Gallacher
Date Added:	12 May 2022 09:31
Last Modified:	12 May 2022 09:32
URI:	https://irep.ntu.ac.uk/id/eprint/46309

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